安賽斯12寸可編程勻膠機(jī)

ANALYSIS Programmable Spin Coater

安賽斯^TM可編程勻膠機(jī)(旋涂儀)

Model: HC300SE

安賽斯12寸可編程勻膠機(jī)

BENEFITS

優(yōu)勢

• Compact design for minimized footprint

設(shè)計(jì)緊湊，占地面積最小化

• Full-color, 7-inch touch screen display

全彩色7英寸觸摸屏顯示屏

• High-density polyethylene (HDPE) spin bowl for maximum chemical compatibility

高密度聚乙烯(HDPE)旋轉(zhuǎn)碗化學(xué)相容性

• Durable benchtop design that is also available in a flange/ deck mountable configuration

耐用的臺(tái)式設(shè)計(jì)，也可采用法蘭/甲板安裝配置

• Advanced PLC fully automatic program control

高級(jí)PLC自動(dòng)程序控制

• Motor glue protection; Easy to clear pipeline design

電機(jī)進(jìn)膠保護(hù)，管路易疏通設(shè)計(jì)

BOWL DESIGN

碗形設(shè)計(jì)

• High-density polyethylene (HDPE) spin bowl

高密度聚乙烯（HDPE）旋轉(zhuǎn)碗

• Optional aluminum foil disposable liners available

可選鋁箔一次性內(nèi)襯

• Polycarbonate transparent lid design beautiful and corrosion-resistant

透明的聚碳酸酯蓋子，美觀耐腐蝕

• Can be placed in Fume hood for use in atmospheric environments

可放在通風(fēng)櫥內(nèi)，用于氣氛環(huán)境使用

• Spin bowl size 413mm, convenient for operation

旋涂碗尺寸413mm，方便操作

PROGRAMMABILITY

可編程性

• Touch screen interface and display

觸摸屏界面和顯示器

• Full-color alphanumeric-capable graphical user interface (GUI)

具有全彩色字母數(shù)字功能的圖形用戶界面（GUI）

• 100 of user-defined recipe programs，with100 steps for each program

100組用戶定義配方程序，每個(gè)程序100步。

• 0.1-second resolution for step times (3000 seconds maximum step time)

步長為0.1秒的分辨率（3000秒最大步進(jìn)）

• Spin speed: 6,000 rpm

轉(zhuǎn)速：6000 rpm

• Spin speed acceleration:

旋轉(zhuǎn)速度加速度：

0 to 30,000 rpm/s unloaded

0至30000轉(zhuǎn)/秒無負(fù)載

• Optional Simultaneous, automated, mulit-dispense capability

可選同時(shí)、自動(dòng)化、多路點(diǎn)膠分配功能

PRECISION

精密度

• Spin speed repeatability: 0.1 rpm

轉(zhuǎn)速可重復(fù)性：0.1 rpm

• Spin speed resolution: 0.1 rpm

轉(zhuǎn)速分辨率：0.1 rpm

• Substrate sizes: 0.5cm to 300 mm round; Or equally sized square samples

基板尺寸：0.5 cm至300 mm圓形或同等尺寸（對(duì)角線）方形樣品

RELIABILITY

可靠性

• Indirect drive system protects the spin motor from contact with process chemicals and solvents

異位電機(jī)設(shè)置保護(hù)旋轉(zhuǎn)電機(jī)不受接觸使用工藝化學(xué)品和溶劑

• Vacuum and lid interlock

真空和蓋子安全檢測互鎖

• Industry-leading reliability and uptime

可靠性和正常運(yùn)行時(shí)間

• 1-year full warranty on parts and labor

零件和勞動(dòng)力的1年全面保修

• Free remote technical support (phone, fax) for the life of the product

遠(yuǎn)程技術(shù)支持（電話、電子郵件、傳真）

• Application process assistance for life of the product

產(chǎn)品使用壽命的應(yīng)用程序幫助

UTILITIES

產(chǎn)品外設(shè)

• Voltage ranges: 100-125, 208-240 VAC, 50/60 Hz

電壓范圍：100-125、208-240 VAC、50/60 Hz

• Power requirements :1200 watts

功率要求：1200瓦

• Exhaust port: 6mm OD

真空接口：6mm

• Vacuum: -92kPa，90L/min

真空：-92kPa，90L/min

DIMENSIONS

尺寸

• 24.1” (51.5cm) W × 18.2” (51.5cm) D × 12” (35cm) H

• Machine weight:55.1lb (25kg)

• Shipping weight: 44.1lb (66kg)）

安賽斯12寸可編程勻膠機(jī)

ATTACHMENT

附件

• One HCV500 oil-free vacuum pump with a pumping speed of 90L/min;

HCV500無油真空泵1臺(tái)，抽氣速度90L/min；

• Standard with one 8-inch Spin Chuck, suitable for 8-12 inch wafer spin coating, and other sizes of Spin Chuck can be customized;

標(biāo)配8英寸載物盤1只，適合8-12英寸晶元旋涂，其他尺寸規(guī)格載物盤可定制；